In this paper, by using ANSYS software, dynamic analysis is conducted to ultrasonic vibration machining system including the modal and harmonic response analysis about the transducer and amplitude transformer. Numerical simulation results are compared with the theoretical value, the experimental study of microstructure is completed through ANSYS parametric optimization design. Ultrasonic assisted electrolysis contrast test is completed with microstructures such as arrays of circular pits, Arrays of square pits, PZ Drives.etc through optimized system. The rationality and feasibility of the optimization design for this system is verified. The technical advantages are proved on the basis of parametric optimal design in difficult-to-process materials and special-shaped surface processing through microstructure test.